Optimization of white light interferometry on rough surfaces based on error analysis-Reference-Cited by-同舟云学术

Optimization of white light interferometry on rough surfaces based on error analysis

Published:2004 Issue:8 Volume:115 Page:351-357
ISSN:0030-4026
Container-title:Optik
language:en
Short-container-title:Optik

Author:

Saraç Zehra,Groß Reinhard,Richter Claus,Wiesner Bernhard,Häusler Gerd

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference11 articles.

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3. Ettl P, Schmidt B, Schenk M, Laszlo I, Häusler G: Roughness parameters and surface deformation measured by coherence radar. International Conference on Applied Optical Metrology (1998) Balaton für ed, Hungary 133–140

4. Ettl P: Über die Signalentstehung bei Weißlichtinterferometrie. Doctoral Thesis, Erlangen, Germany 2001

5. Ammon G, Andretzky P, Bohn G, Ettl P, Habermeier HP, Harand B, Haäusler G: Coherence radar-new modifications of white light interferometry for large object shape acquisition. Proceeding of the EOS Topical Meeting on Optoelectronics Distance Measurement and Applications (1997) 237–246

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