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Differential algebraic method for arbitrary-order aberration analysis of combined electron beam focusing-deflection systems

  • Published:2002 Issue:4 Volume:113 Page:181-187
  • ISSN:0030-4026
  • Container-title:Optik
  • language:en
  • Short-container-title:Optik

Author:

Wang L.-P.,Tang T.-T.,Cheng B.-J.,Cleaver J.R.A.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference7 articles.

1. Canonical theory in electron optics;Ximen,1991

2. Lie algebraic theory of charged particle optics and electron microscopes;Dragt,1986

3. Lie algebraic aberration theory and calculation method for combined electron beam focusing-deflection systems;Hu;J. Vac. Sci. Technol.,1998

4. Differential algebraic description of beam dynamics to very high orders;Berz;Particle Accelerators,1989

5. Differential algebraic theory and calculation for arbitrary high order aberrations of electron lenses;Wang;Optik,2000

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1. Focusing-deflection composite system of space electron beam guns based on the curvilinear variable axis lens theory;Optics Express;2022-06-15

2. Notes and References;Principles of Electron Optics;2018

3. Dynamic Correction of Higher-Order Deflection Aberrations in the Environmental SEM;Microscopy and Microanalysis;2015-06

4. Design and optimization of multipole lens and Wien filter systems;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;2011-07

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