Affiliation:
1. Center for Research on Microelectronics & Nanotechnology, CRMN 4050 Sousse, TUNISIA
Abstract
This paper presents the design and simulation of two-variable MEMS inductors for high-frequency applications. In two cases, the inductors' cores are enclosed between two tunable metal plates. The medium permeability changes in response to iron plate movement, ensuring a high-tuning range above 250%. The first inductor is designed for the 10 GHz range, and the inductance value is comprised of Lmin = 3.37 nH and increases to Lmax = 11.8 nH. Similar inductance values are obtained for the second inductor, but it is designed to work at 20 GHz. Furthermore, the maximum value of the quality factor of the second inductor is slightly higher than the first one and reaches Qmax = 17.5.
Publisher
World Scientific and Engineering Academy and Society (WSEAS)
Reference22 articles.
1. Rajni Prashar and G. Kapur, “On-Chip Tunable Active Inductor Circuit for Radio Frequency Ics,” WSEAS Transactions on Electronics, vol. 14, pp. 91–103, Dec. 2023, https://doi.org/10.37394/232017.2023.14.11.
2. J. Chatzakis, S. Hassan, E. Clark, M. Tatarakis “A 1GHz Low-cost, Ultra Lownoise Preamplifier,” WSEAS Transactions on Electronics, vol. 11, Sep. 2020, https://doi.org/10.37394/232017.2020.11.15.
3. Sabrije Osmanaj and Rexhep Selimaj, “Simulation and Design of an Integrated Planar Inductor Using Fabrication Technology,” WSEAS Transactions on Electronics, vol. 8, Jan. 2017.
4. N. Habbachi and K. Besbes, “Performance Evaluation of Microfluidically Tunable Microwave Filters,” Electronics, vol. 11, no. 18, p. 2889, Sep. 2022, https://doi.org/10.3390/electronics11182889.
5. N. Habbachi and K. Besbes, “RF MEMS filter based on dual liquid variations,” Journal of Micromechanics and Microengineering, vol. 32, no. 6, p. 065002, Apr. 2022, https://doi.org/10.1088/1361-6439/ac6203.