Studies on Electrolytic Buffing of Single Crystal Silicon (2nd Report)-Reference-Cited by-同舟云学术

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Studies on Electrolytic Buffing of Single Crystal Silicon (2nd Report)

Published:1977 Issue:510 Volume:43 Page:650-655
ISSN:0374-3543
Container-title:Journal of the Japan Society of Precision Engineering
language:en
Short-container-title:Journal of the Japan Society of Precision Engineering

Author:

HUYNH Nhan van,TOKURA Hitoshi,YOSHIKAWA Masanori,ASAEDA Toshio

Publisher

Japan Society for Precision Engineering

Reference8 articles.

1. 2) A. Uhlir, Jr. : Electrolytic Shaping of Germanium and Silicon, Bell System Tech. J., 35, (1956) 333.

2. 3) D. R. Turner : Electropolishing Silicon in HydrofluoricAcidSOlutions, J. Electrochem. Soc., 105, (1958) 402.

3. 4) P. F. Schmidt and D. A. Keiper : On the Jet Etching of N-Type Si, J. Electrochem. Soc., 106, (1959) 592.

4. 5) D. R. Turner : On the Mechanism of Chemically Etching Germanium and Silicon, J. Electrochem. Soc., 107, (1960) 810.

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