1. 1) S. Usuki, H. Nishioka, S. Takahashi and K. Takamasu : Super-resolution optical inspection for semiconductor defects using standing wave shift, Proc. of SPIE International Symposium on Optomechatronic Technologies, (2005) 60490C-1.
2. 4) R. Kudo, S. Usuki, S. Takahashi and K. Takamasu : Fundamental Verification for 2-Dimensional Super-Resolution Optical Inspection for Semiconductor Defects by Using Standing Wave Illumination Shift, The XIX World Congress IMEKO 2009 TC2-354, (2009) 106.
3. 5) M.G.L. Gustafsson : Surpassing the lateral resolution limit by a factor of two using structured illumination microscopy, Journal of Microscopy, 198, 2 (2000) 82.
4. 6) R. Fedosseev, Y. Belyaev, J. Frohn and A. Stemmer : Structured light illumination for extended resolution in fluorescence micro-scopy, Optics and Lasers in Engineering, 43 (2005) 403.
5. 7) Peter T.C. So, Hyuk-Sang Kwon and Chen Y. Dong : Resolution enhancement in standing wave total internal reflection micro-scopy, Journal of Optical Society of America A, 18, 11 (2001) 2833.