Nanofabrication and Manipulation Using Scanning Probe Microscopes
Author:
Publisher
Japan Society for Precision Engineering
Subject
Mechanical Engineering
Link
https://www.jstage.jst.go.jp/article/jjspe/83/2/83_135/_pdf
Reference12 articles.
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3. 4) D.W. Pohl, W. Denk, and M. Lanz : Optical stethoscopy : Image recording with resolution λ/20, Appl. Phys. Lett., 44 (1984) 651.
4. 5) F. Iwata, K. Saigo, T. Asao, M. Yasutake, O. Takaoka, T. Nakaue and S. Kikuchi : Removal method of nano-cut debris for photo-mask repair using an atomic force microscopy system, Jpn. J. Appl. Phys., 48 (2009) 08JB20-1-4.
5. 6) F. Iwata, K. Kawanishi, H. Aoyama and T. Ushiki : Development of a nano manipulator based on an atomic force microscope coupled with a haptic device : a novel manipulation tool for scanning electron microscopy, Arch. Histol. Cytol., 72, (2009) 271.
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