Microstructure Analysis of Diamond-Like Carbon Produced by Focused Ion Beam Assisted Chemical Vapor Deposition
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Publisher
Japan Society for Precision Engineering
Link
https://www.jstage.jst.go.jp/article/jspe/71/11/71_11_1383/_pdf
Reference21 articles.
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2. 2) B. Singh, D. McClelland, F. Tams III, B. Halon, O. Mesker and D. Furst : Use of Black Diamond-Like Carbon Films as a Contrast Enhancement Layer for Liquid-Crystal Displays, Appl. Phys. Lett., 57, (1990) 2288.
3. 3) R. Gago, I. Jiménez, J. Albella, A. Climent-Font, D. Cáceres, I. Vergara, J.C. Banks, B.L. Doyle and L.J. Terminello : Bonding and Hardness in Nonhydrogenated Carbon Films with Moderate sp3 Content, J. Appl. Phys., 87, (2000) 8174.
4. 4) F. Qian, R.K. Singh, S.K. Dutta and P.P. Pronko : Laser Deposition of Diamondlike Carbon Films at High Intensities, Appl. Phys. Lett., 67, (1995) 3120.
5. 5) E.C. Samano, G. Sato, A. Olivas and L. Cota : DLC Thin Filmes Characterized by AES, XPS and EELS, Appli. Surf. Sci., 202, (2002) 1.
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