1. 1) http://www.iso.org/iso/home.htm
2. 3) Semiconductor Industry Association : Metrology Roadmap 2010, (2010).
3. 4) H. P. Kleinknecht, et al. : Optical Monitoring of Etching of SiO2 and Si3N4 on Si by the Use of Grating Test Patterns, J. Electrochem. Soc. : Solid-State Sci. Tech, 125, 5 (1978) 798-803.
4. Rigorous coupled-wave analysis of planar-grating diffraction