Displacement Measuring Optical Interferometer (Sinusoidal Frequency/Phase Modulation Interferometer)
Author:
Publisher
Japan Society for Precision Engineering
Subject
Mechanical Engineering
Link
https://www.jstage.jst.go.jp/article/jjspe/85/8/85_675/_pdf
Reference9 articles.
1. 3) A. Dandridge, A. Tveten and T. Giallorenzi : Homodyne demodulation scheme for fiber optic sensors using phase generated carrier, IEEE Journal of Quantum Electronics, 18 (1982) 1647.
2. 4) M. Madden, M. Aketagawa, T. Kumagai, Y. Maeda and E. Okuyama : Concurrent measurement method of spindle radial, axial and angular motions using concentric circle grating and phase modulation interferometers, Meas. Sci. Technol, 25 (2014) 094005.
3. 5) T.T. Vu, M. Higuchi and M. Aketagawa : Accurate displacement-measuring interferometer with wide range using an I2 frequency-stabilized laser diode based on sinusoidal frequency modulation, Meas. Sci. Technol., 27 (2016) 105201.
4. 6) Quang Anh Duong, Thanh Tung Vu, M. Higuchi, D. Wei and M. Aketagawa : Iodine-frequency-stabilized laser diode and displacement-measuring interferometer based on sinusoidal phase modulation, Meas. Sci. Technol., 29 (2018) 065204.
5. 9) N.C. Wong and J.L. Hall : Servo control of amplitude mod-ulation in frequency-modulation spectroscopy : demonstration of shot-noise-limited detection, J. Opt. Soc. Am. B2 (1985) 1527.
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