Author:
AOYAMA Hisayuki,IWASAKI Takayuki,SASAKI Akira,FUKAYA Jisuke,SHIMOKOHBE Akira
Publisher
Japan Society for Precision Engineering
Reference9 articles.
1. 1) K. Lindsey, S. T. Smith and C. J. Robbie : Sub-Nanometer Surface Texture and Profile Measurement with NANOSURF 2, Ann. CIRP, 37, (1988) 519.
2. 3) K. Busch, H. Kunzmann and F. Wawldele : Numerical Error-Correction of a Coordinate Measuring Machine, Proc. Int. Symp. on Metrology for Quality Control in Production, Tokyo, (1984) 278.
3. 4) E. C. Teague : The NIST Molecular Measuring Machine Project : Metrology and Precision Engineering Design, J. Vac. Sci. Technol., B 7 (6), Nov/Dec (1989) 1898.
4. 5) D. W. Pohl : Some Design Criteria in Scanning Tunneling Microscopy, IBM J. Res. Develop., 30, 4, (1986) 417.
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