Extended Shadowing Compensation Model in Robust SEM Photometric Stereo

Author:

CHEN Deshan,MIYAMOTO Atsushi,KANEKO Shun'ichi

Publisher

Japan Society for Precision Engineering

Subject

Mechanical Engineering

Reference15 articles.

1. 1) A. Miyamoto and T. Honda : Development of Surface/Embedded Particle Classification Algorithm for SEM-ADC, IEICE Transaction on Information & Systems, J91-D, 6, (2008), 1604.

2. 2) T. Oshima, S. Kimoto and T. Suganuma : Stereomicrography with a Scanning Electron Microscope, Photogrammetric Engineering, 36, (1970), 874.

3. 3) G. Koenig, W. Nickel, J. Storl, D. Meyer, and J. Stange : Digital Stereophotogrammetry for Processing SEM Data, Scanning, 9, (1987), 185.

4. 4) O. V. Kholodilov, A. Ya. Grigoryev and N. K. Myshkin : Reconstruction of true topographies of solid surfaces in scanning electron microscopes using secondary electrons, Scanning, 9, (1987), 156.

5. 5) J. Lebiedzik : An Automatic Topographical Surface Reconstruction in the SEM, Scanning, 2, (1979), 230.

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