Observation of Particle Behavior between Tool and Workpiece in Ultra-Precision Local Machining of Glass Surfaces Using Organic Abrasive
Author:
Affiliation:
1. 東京大学大学院工学系研究科
2. 夏目光学株式会社テクノロジーセンター
3. 東京大学先端科学技術研究センター
Publisher
Japan Society for Precision Engineering
Subject
Mechanical Engineering
Link
https://www.jstage.jst.go.jp/article/jjspe/89/11/89_844/_pdf
Reference12 articles.
1. 1) K. Yamauchi, H. Mimura, K. Inagaki and Y. Mori: Figuring with subnanometer-level accuracy by numerically controlled elastic emission machining, Rev. Sci. Instrum. 73, 4028 (2002).
2. 2) H. Mimura, K. Yamauchi, K. Yamamura, A. Kubota, S. Matsuyama, Y. Sano, K. Ueno, K. Endo, Y. Nishino, K. Tamasaku, M. Yabashi, T. Ishikawa, and Y. Mori: Image quality improvement in a hard X-ray projection microscope using total reflection mirror optics, J. Synchrotron Radiat. 11, 343 (2004).
3. 3) J. E. DeGroote, A. E. Marino, J. P. Wilson, A. L. Bishop, J. C. Lambropoulos, and S. D. Jacobs: Removal rate model for magnetorheological finishing of glass, Appl. Opt. 46(32), 7927-7941 (2007).
4. 4) W. Kordonski and S. Gorodkin: Material removal in magnetorheological finishing of optics, Appl. Opt. 50(14), 1984-1994 (2011).
5. 5) Y. Takei and H. Mimura: Effect of focusing flow on stationary spot machining properties in elastic emission machining, Nanoscale Res. Lett. 8, 237 (2013).
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