Precision Profiling Method Insensitive to Vertical Vibrations (1st Report)-Reference-Cited by-同舟云学术

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Precision Profiling Method Insensitive to Vertical Vibrations (1st Report)

Published:1990 Issue:1 Volume:56 Page:140-145
ISSN:0912-0289
Container-title:Journal of the Japan Society for Precision Engineering
language:en
Short-container-title:Journal of the Japan Society for Precision Engineering

Author:

ADACHI Masaaki,MIKI Hideshi,NAKAI Yasuhide,KAWAGUCHI Itaru

Publisher

Japan Society for Precision Engineering

Subject

Mechanical Engineering

Reference11 articles.

1. 1) J. M. Bennett, J. J. Shaffer, Y. Shibano and Y. Namba : Float Polishing of Optical Materials, Appl. Opt., 4, 26, (1987) 696.

2. 3) S. N. Jabr : Surface-roughness Measurement by Digital Processing of Nomarski Phase-contrast Images, Opt. Lett., 10, 11, (1985) 526.

3. 4) F. Laeri and T. C. Strand : Angstrom Resolution Optical Profilometry for Microscopic Objects, Appl. Opt., 26, 11, (1987) 2245.

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1. Development of Optical Sensor for Detecting Micro Crack on Contact Surface;Key Engineering Materials;2010-11

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