Author:
ISOBE Hiromi,MORIGUCHI Takanari,KYUSOJIN Akira
Publisher
Japan Society for Precision Engineering
Cited by
3 articles.
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1. Design and performance of a piezoelectric actuated precise rotary positioner;Review of Scientific Instruments;2006-10
2. XY? actuators using piezoelectric and electromagnetic actuators;Electrical Engineering in Japan;2000-06
3. An XYΘ actuator with a closed-loop magnetic field;MHA'98. Proceedings of the 1998 International Symposium on Micromechatronics and Human Science. - Creation of New Industry - (Cat. No.98TH8388)