Publisher
Japan Society for Precision Engineering
Reference2 articles.
1. 1) J, Gannon et al.: A Robust Low Noise MEMS Servo Accelerometer, Proceedings of the ISA Emerging Technologies Conference, Paper#2000, Houston, TX, September 10-12, 2001.
2. Application of electrostatic feedback to critical damping of an integrated silicon capacitive accelerometer
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2 articles.
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