A Study on Surface Formation Mechanism by Molecular Beam Epitaxy. (2nd Report). An Effect of Substrate Orientation upon Si-Si Homo-Epitaxial Growth Mechanism.
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Published:2001
Issue:2
Volume:67
Page:316-321
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ISSN:1882-675X
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Container-title:Journal of the Japan Society for Precision Engineering
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language:ja
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Short-container-title:Journal of the Japan Society for Precision Engineering
Author:
KANEKO Arata,FURUKAWA Yuji
Publisher
Japan Society for Precision Engineering
Subject
Mechanical Engineering
Cited by
1 articles.
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1. A Study on Nano-texturing using Islands Generation in Epitaxial Growth;Journal of the Japan Society for Precision Engineering, Contributed Papers;2005