Microfabricated Shear Stress Sensors, Part 1: Design and Fabrication

Author:

Pan Tao1,Hyman Daniel1,Mehregany Mehran1,Reshotko Eli1,Garverick Steven1

Affiliation:

1. Case Western Reserve University, Cleveland, Ohio 44106

Publisher

American Institute of Aeronautics and Astronautics (AIAA)

Subject

Aerospace Engineering

Reference18 articles.

1. Microfabricated Shear Stress Sensors, Part 2: Testing and Calibration

2. An outline of the techniques available for the measurement of skin friction in turbulent boundary layers

3. Schmidt, M. A. “Microsensors for the Measurement of Shear Forces in Turbulent Boundary Layers,” Ph.D. Thesis,Dept. of Electrical Engineering and Computer Science, Massachusetts Inst. of Technology,Cambridge, MA,1988.

4. Silicon micromechanics: sensors and actuators on a chip

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