1. B.A.PARVIZ,T.K.CHOU,C.ZHANG,K.NAJAFJ,M.0. MULLER,L. P. BERNAL,ANOP.WASHABAUGH 2000 A waferintegratedarrayofmicromachinedelectrostatically-driven ultrasonicresonatorstormicrofluidicapplications.Submittedto MEMS 2000 conference,January 23-27, 2000, Miyazaki, Jaan.