Cesium ion sputtering of aluminum, copper, and titanium.
Author:
Affiliation:
1. Electro-Optical Systems Inc., A Subsidiary of Xerox Corporation, Pasadena, Calif.
Publisher
American Institute of Aeronautics and Astronautics (AIAA)
Subject
Aerospace Engineering
Link
http://arc.aiaa.org/doi/pdf/10.2514/3.3916
Reference16 articles.
Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Emittance calculations and measurements for a sputter-type negative-ion source;Nuclear Instruments and Methods in Physics Research;1984-03
2. Sputtering yield measurements;Topics in Applied Physics;1981
3. The sputtering of oxides part i: a survey of the experimental results;Radiation Effects;1973-01
4. Lithium and Sodium Surface Ionization Ion Source Operation and Efficiency;Review of Scientific Instruments;1971-09
5. Sputtering and depth-distribution phenomena in KCl, Al2O3, and TiO2;Canadian Journal of Physics;1968-03-15
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