Sputter Deposition
Publisher
ASM International
Reference93 articles.
1. Ion Beam Deposition
2. Microfabrication by Ion Beam Etching;Lee;J. Vac. Sci. Technol.,1979
3. Deposition of Metastable Films by Ion Beam and Plasma Techniques;Weissmantel
Cited by
1 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Surface Engineering to Add a Surface Layer or Coating;Surface Engineering for Corrosion and Wear Resistance;2001-03-01