Nanoprobe Nodal Analysis with Stitch Diagram in Local Fault Isolation

Author:

Gleason Al1,West John1,Xia Min2

Affiliation:

1. Texas Instruments, Dallas, Texas, USA

2. Synopsys, Austin, Texas, USA

Abstract

Abstract In order to understand and communicate a PFA strategy during an analysis, a two-dimensional diagram of the layout of a suspect net has been developed. Net connections are extracted from the layout and drawn in a two-dimensional stitch diagram. The result is a simplified diagram providing a stack view of the layout layers for the net(s) of interest. Key analysis decisions are made and communicated using the stitch diagram. Using this diagram, selective nanoprobe measurements are made. Software implementation that extracts and draws the diagram allows for faster creation as well as making larger nets practical. As examples show, nanoprobe curve trace analysis using a simplified diagram has proven to be a successful evidence based approach to physical failure analysis of complex nets.

Publisher

ASM International

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