A Self-Test on Wafer Level for a MEM Gyroscope Readout Based on $\Delta \Sigma$ Modulation-Reference-Cited by-同舟云学术

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A Self-Test on Wafer Level for a MEM Gyroscope Readout Based on $\Delta \Sigma$ Modulation

Published:2018-03 Issue:3 Volume:65 Page:870-880
ISSN:1549-8328
Container-title:IEEE Transactions on Circuits and Systems I: Regular Papers
language:
Short-container-title:IEEE Trans. Circuits Syst. I

Author:

Nessler Sebastian^ORCID,Marx Maximilian,Manoli Yiannos^ORCID

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering

Link

http://xplorestaging.ieee.org/ielx7/8919/8293879/08103785.pdf?arnumber=8103785

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A low-noise readout interface for silicon MEMS vibratory gyroscope;Modern Physics Letters B;2020-10-17

2. Measuring and calibrating of the parasitic mismatch in MEMS accelerometer based on harmonic distortion self-test;Sensors and Actuators A: Physical;2020-10

3. A ΣΔ Closed-Loop Interface for a MEMS Accelerometer with Digital Built-In Self-Test Function;Micromachines;2018-09-06

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