Modeling, Analysis and Control of Dual-Arm Cluster Tools With Residency Time Constraint and Activity Time Variation Based on Petri Nets
Author:
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Control and Systems Engineering
Link
http://xplorestaging.ieee.org/ielx5/8856/6177232/06138879.pdf?arnumber=6138879
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3. Implementation of Novel Scheduling Methods for Dual-arm Cluster Tools with Multiple-time Reentrant flows based on Petri Nets;2023 IEEE International Conference on Networking, Sensing and Control (ICNSC);2023-10-25
4. Optimal Cyclic Scheduling of Wafer-Residency-Time-Constrained Dual-Arm Cluster Tools by Configuring Processing Modules and Adjusting Robot Waiting Time;2023 IEEE 19th International Conference on Automation Science and Engineering (CASE);2023-08-26
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