The Study of Deposition Process of the TiN coating for Atomic Force Microscopy Cantilevers-Reference-Cited by-同舟云学术

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The Study of Deposition Process of the TiN coating for Atomic Force Microscopy Cantilevers

Published:2022-10-03 Issue: Volume: Page:
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Container-title:2022 International Conference on Information, Control, and Communication Technologies (ICCT)
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Author:

Krasnoborodko Sergey Yu.¹,Vysokikh Yury E.¹,Paramonov Vladislav V.²,Medvedev Boris K.²,Filippov Nikolay A.²,Andreev Alexey V.¹

Affiliation:

1. Magnetic Materials and Structures Scientific and Technological Centre of Unique Instrumentation of the RAS,Laboratory of Nanogradient Optics,Moscow,Russia

2. National Research University of Electronic Technology Zelenograd,MEMSEC R&D Center,Moscow,Russia

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9976491/9976498/09976789.pdf?arnumber=9976789

Reference12 articles.

1. Low energy ion beam fabrication of ultra smooth and sharp AFM nano-tips from single crystal diamond rods;mahmud;Proceedings of 12th Edition of Trends in Nanotechnology International Conference,2011

2. Carbon tip aperture cantilevers: Fabrication & features in near-field magneto-optical imaging

3. History of atomic layer deposition and its relationship with the American Vacuum Society

4. Atomic Force Microscopy: General Principles and a New Implementation

5. Test structure for SPM tip shape deconvolution;bykov;Appl Phys,1998

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