Long-Term Stability Improvement of Micro-Hotplate Methane Sensor Product-Reference-Cited by-同舟云学术

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Long-Term Stability Improvement of Micro-Hotplate Methane Sensor Product

Published:2020-01 Issue: Volume: Page:
ISSN:
Container-title:2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)
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Author:

Chen Ying,Xu Pengcheng,Zhang Pingping,Li Xinxin

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9039791/9056108/09056233.pdf?arnumber=9056233

Cited by 11 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Quantitative measurement of catalytic performance of zeolites for gas sensing using in situ temperature-programmed desorption technique;Sensors and Actuators B: Chemical;2024-05

2. Development of Glass-Substrate-Based MEMS Micro-Hotplate with Low-Power Consumption and TGV Structure Through Anodic Bonding and Glass Thermal Reflow;2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS);2024-01-21

3. Electronic Nose Based on the Integration of MEMS Multi-Sensor and CMOS Circuit;2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS);2024-01-21

4. Glass-Based Micro-Hotplate With Low Power Consumption and TGV Structure Through Anodic Bonding and Glass Thermal Reflow;Journal of Microelectromechanical Systems;2024

5. Research on Simulation and Optimization of Micro-Heat Plate Structure of MEMS Gas Sensor;2023 24th International Vacuum Electronics Conference (IVEC);2023-04-25

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