1. Siberian State University of Telecommunications and Informatics,Dept. of Physics,Novosibirsk,Russia
2. Rzhanov Institute of Semiconductor Physics, SB RAS,Lab. of nanotechnologies and nanomaterials,Novosibirsk,Russia
3. Three-dimensional Nanostructures Rzhanov Institute of Semiconductor Physics, SB RAS,Lab. of Physics and Technology,Novosibirsk,Russia