PECVD SiC as a Chemical Resistant Material in MEMS-Reference-Cited by-同舟云学术

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PECVD SiC as a Chemical Resistant Material in MEMS

Published:2006-01 Issue: Volume: Page:
ISSN:
Container-title:2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems
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Author:

Guo Hui,Wang Yu,Chen Sheng,Zhang Guobing,Zhang Haixia,Li Zhihong

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx5/4134878/4084516/04135073.pdf?arnumber=4135073

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