ScAlN-Based LCAT Mode Resonators Above 2 GHz With High FOM and Reduced Fabrication Complexity-Reference-Cited by-同舟云学术

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ScAlN-Based LCAT Mode Resonators Above 2 GHz With High FOM and Reduced Fabrication Complexity

Published:2017-10 Issue:10 Volume:38 Page:1481-1484
ISSN:0741-3106
Container-title:IEEE Electron Device Letters
language:
Short-container-title:IEEE Electron Device Lett.

Author:

Zhu Yao,Wang Nan,Chua Gengli,Sun Chengliang^ORCID,Singh Navab,Gu Yuandong^ORCID

Funder

A*STAR, SERC

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials

Link

http://xplorestaging.ieee.org/ielx7/55/8049543/08022908.pdf?arnumber=8022908

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4. High speed surface acoustic wave and laterally excited bulk wave resonator based on single-crystal non-polar AlN film;Applied Physics Letters;2023-12-18

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