High- ${Q}$ Butterfly-Shaped AlN Lamb Wave Resonators-Reference-Cited by-同舟云学术

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High- ${Q}$ Butterfly-Shaped AlN Lamb Wave Resonators

Published:2017-12 Issue:12 Volume:38 Page:1739-1742
ISSN:0741-3106
Container-title:IEEE Electron Device Letters
language:
Short-container-title:IEEE Electron Device Lett.

Author:

Zou Jie^ORCID,Lin Chih-Ming^ORCID,Tang Gongbin,Pisano Albert P.

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials

Link

http://xplorestaging.ieee.org/ielx7/55/8103303/08093941.pdf?arnumber=8093941

Cited by 56 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Adjustable effective electromechanical coupling of Lamb wave resonator using AlN/Sc_0.096Al_0.904N composite films;Japanese Journal of Applied Physics;2024-06-03

2. Enhanced anchor quality factor of an aluminium nitride-on-silicon MEMS resonator using support tethers based on compound leaf-shaped one dimensional phononic crystal;Microsystem Technologies;2024-05-27

3. Multi-Stage Frames for Q-Enhancement in Piezoelectric MEMS Resonators;2024 IEEE MTT-S International Conference on Microwave Acoustics & Mechanics (IC-MAM);2024-05-13

4. A Q-factor Boost Strategy for High-Order Width-Extensional Mode MEMS Resonators by Varied Unit Length;Journal of Microelectromechanical Systems;2024-04

5. Theoretical analysis of bulk acoustic wave resonators with emerging ε -Ga2O3 piezoelectric film;Applied Physics Letters;2024-01-15

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