Funder
North Carolina State University College of Engineering through its Executive Associate Dean Dr. John Gilligan and the funds provided by the Chancellor’s Innovation Fund
North Carolina State University Nanofabrication Facility (NNF), amember of theNorth Carolina Research Triangle Nanotechnology Network
National Science Foundation
National Nanotechnology Coordinated Infrastructure
Everlight Chemicals through the black matrix resist EK660A
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials