Battery-Less Electronic Layer Detectors Array (ELDA) for In-Tool DUV Detection by FinFET CMOS Technology
-
Published:2021-10
Issue:10
Volume:68
Page:4972-4976
-
ISSN:0018-9383
-
Container-title:IEEE Transactions on Electron Devices
-
language:
-
Short-container-title:IEEE Trans. Electron Devices
Author:
Wang Chien-PingORCID,
Lin Wei-Hwa,
Lin Burn Jeng,
Shih Jiaw-Ren,
Chih Yue-Der,
Chang Jonathan,
Lin Chrong Jung,
King Ya-ChinORCID
Funder
Ministry of Science and Technology (MOST), Taiwan
Taiwan Semiconductor Manufacturing Company
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials