GAN-OPC: Mask Optimization With Lithography-Guided Generative Adversarial Nets

Author:

Yang HaoyuORCID,Li Shuhe,Deng Zihao,Ma YuzheORCID,Yu BeiORCID,Young Evangeline F. Y.

Funder

Research Grants Council of Hong Kong

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Computer Graphics and Computer-Aided Design,Software

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