Author:
Ko Choul-Joo,Lee Sang-Yong,Park Il-Yong,Park Cho-Eung,Jun Bon-Keun,Lee Yong-Jun,Kang Chan-Hee,Lee Jae-O,Kim Nam-Joo,Yoo Kwang-Dong
Cited by
1 articles.
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1. Influence of Ion Implantation on Void Defect Formation in Epitaxially Grown Silicon;2023 China Semiconductor Technology International Conference (CSTIC);2023-06-26