GaN: A multifunctional material enabling MEMS resonators based on amplified piezoelectric detection-Reference-Cited by-同舟云学术

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GaN: A multifunctional material enabling MEMS resonators based on amplified piezoelectric detection

Published:2011-05 Issue: Volume: Page:
ISSN:
Container-title:2011 Joint Conference of the IEEE International Frequency Control and the European Frequency and Time Forum (FCS) Proceedings
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Author:

Faucher Marc,Ben Amar Achraf,Grimbert Bertrand,Brandli Virginie,Werquin Matthieu,Buchaillot Lionel,Gaquiere Christophe,Theron Didier,Cordier Yvon,Semond Fabrice,Werquin Matthieu

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx5/5959913/5977269/05977761.pdf?arnumber=5977761

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Piezoelectric MEMS resonators based on ultrathin epitaxial GaN heterostructures on Si;Journal of Micromechanics and Microengineering;2016-09-09

2. Phonon-Electron Interactions in Piezoelectric Semiconductor Bulk Acoustic Wave Resonators;Scientific Reports;2014-07-08

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