Thermal asymmetry compensation of a wind sensor fabricated on ceramic substrate
Author:
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx5/5678851/5689839/05690453.pdf?arnumber=5690453
Cited by 10 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Low-Drift MEMS Thermal Wind Sensor With Symmetric Packaging Using Plastic Injection Molding Process;IEEE Transactions on Instrumentation and Measurement;2021
2. Temperature Effects of a Ceramic MEMS Thermal Wind Sensor Based on a Temperature-Balanced Mode;IEEE Sensors Journal;2019-09-01
3. Temperature Effect and Its Compensation of a Micromachined 2-D Anemometer;IEEE Sensors Journal;2019-07-15
4. Modeling, Simulation, and Fabrication of a 2-D Anemometer Based on a Temperature-Balanced Mode;IEEE Sensors Journal;2019-07-01
5. Modeling of Temperature Effects on Micromachined Silicon Thermal Wind Sensors;Journal of Microelectromechanical Systems;2015-12
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