Evolution of Hydride Components Generated by Hydrogen Plasma Irradiation of a Si(110) Surface Investigated With In Situ Infrared Absorption Spectroscopy in Multiple Internal Reflection Geometry-Reference-Cited by-同舟云学术

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Evolution of Hydride Components Generated by Hydrogen Plasma Irradiation of a Si(110) Surface Investigated With In Situ Infrared Absorption Spectroscopy in Multiple Internal Reflection Geometry

Published:2013-08 Issue:8 Volume:41 Page:1878-1883
ISSN:0093-3813
Container-title:IEEE Transactions on Plasma Science
language:
Short-container-title:IEEE Trans. Plasma Sci.

Author:

Shinohara Masanori,Takami Yoshiki,Takabayashi Susumu,Oda Akinori,Matsuda Yoshinobu,Fujiyama Hiroshi

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Condensed Matter Physics,Nuclear and High Energy Physics

Link

http://xplorestaging.ieee.org/ielx7/27/6576194/06529170.pdf?arnumber=6529170

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Hydrogen atom kinetics in capacitively coupled plasmas;Plasma Sources Science and Technology;2017-04-05

2. Infrared Spectroscopic Study of Hydrogenation Process of Si(100) Surface During Hydrogen Plasma Exposure;IEEE Transactions on Plasma Science;2016-12

3. Infrared spectroscopic study of the reactions between an octadecyltrichlorosilane self-assembled monolayer and plasma;Japanese Journal of Applied Physics;2014-11-12

4. Adsorption of hydrocarbon components generated in deuterated benzene plasma studied by in situ real-time infrared absorption spectroscopy;Japanese Journal of Applied Physics;2014-08-22

5. Reactions of surface hydrogen on amorphous carbon films with hydrogen plasma;Japanese Journal of Applied Physics;2013-12-18

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