Modeling and Control of a Piezo-Driven XYZ Series-Type Compliant Nanopositioning Stage
Author:
Affiliation:
1. South China University of Technology,Guangdong Key Laboratory of Precision Equipment and Manufacturing Technique,Guangzhou,China
Funder
National Natural Science Foundation of China
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10241359/10241362/10241819.pdf?arnumber=10241819
Reference18 articles.
1. Modeling and High Dynamic Compensating the Rate-Dependent Hysteresis of Piezoelectric Actuators via a Novel Modified Inverse Preisach Model
2. Modeling and Control of Piezo-Actuated Nanopositioning Stages: A Survey
3. Hysteresis Modeling of Amplified Piezoelectric Stack Actuator for the Control of the Microgripper;dsouza;American scientific research journal for engineering technology and sciences,2016
4. Feedforward Controller With Inverse Rate-Dependent Model for Piezoelectric Actuators in Trajectory-Tracking Applications
5. Design and Control of a Three-Axis Serial-Kinematic High-Bandwidth Nanopositioner
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