A CMOS MEMS Thermal Flow Sensor for Gas and Liquid With Parylene-C Coating-Reference-Cited by-同舟云学术

A CMOS MEMS Thermal Flow Sensor for Gas and Liquid With Parylene-C Coating

Author:

Xu Wei^ORCID,Wang Xiaoyi^ORCID,Mousa Basant,Paszkiewicz Maria^ORCID,Lee Yi-Kuen^ORCID

Funder

Natural Science Foundation of Guangdong Province

Natural Science Foundation of Shenzhen University

High-Talent Research Funding

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials

Link

Cited by 8 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Research on Natural Gas Flow Detection Based on Heat Distribution Type MEMS Gas Flow Sensor;2024 6th International Conference on Energy Systems and Electrical Power (ICESEP);2024-06-21

2. Effect of the Substrate Heat Conduction on the Heat Distribution Type MEMS Natural Gas Flow Sensor;2024 5th International Conference on Information Science, Parallel and Distributed Systems (ISPDS);2024-05-31

3. Simulation Research on the Natural Gas Flow Sensor Based the MEMS Technology;2024 6th International Conference on Communications, Information System and Computer Engineering (CISCE);2024-05-10