Scheduling Single-Arm Multicluster Tools for Two-Type Wafers With Lower-Bound Cycle Time-Reference-Cited by-同舟云学术

Scheduling Single-Arm Multicluster Tools for Two-Type Wafers With Lower-Bound Cycle Time

Published:2023 Issue: Volume: Page:1-14
ISSN:2168-2216
Container-title:IEEE Transactions on Systems, Man, and Cybernetics: Systems
language:
Short-container-title:IEEE Trans. Syst. Man Cybern, Syst.

Author:

Zhu QingHua¹^ORCID,Wang GengHong¹,Wu NaiQi²^ORCID,Qiao Yan²^ORCID,Hou Yan¹,Zhou MengChu³^ORCID,Zhao SiDe⁴

Affiliation:

1. School of Computer Science and Technology, Guangdong University of Technology, Guangzhou, China

2. Collaborative Laboratory for Intelligent Science and Systems, Institute of Systems Engineering, Macau University of Science and Technology, Macau, China

3. School of Information and Electronic Engineering, Zhejiang Gongshang University, Hangzhou, China

4. Software Department, Lam Research Corporation, Fremont, CA, USA

Funder

Natural Science Foundation of Guangdong Province, China

Science and Technology Development Fund (FDCT), Macau SAR

Research Fund of Guangdong–Hong Kong–Macao Joint Laboratory for Intelligent Micro-Nano Optoelectronic Technology

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Computer Science Applications,Human-Computer Interaction,Control and Systems Engineering,Software

Link

http://xplorestaging.ieee.org/ielx7/6221021/6376248/10189402.pdf?arnumber=10189402

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