1-octadecanethiol Sam on CMOS-MEMS Gold-Plated Resonator via Dip-Cast for VOCS Sensing-Reference-Cited by-同舟云学术

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1-octadecanethiol Sam on CMOS-MEMS Gold-Plated Resonator via Dip-Cast for VOCS Sensing

Published:2023-01-15 Issue: Volume: Page:
ISSN:
Container-title:2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
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Author:

Perelló-Roig Rafel¹,Verd Jaume¹,Bota Sebastià¹,Soberats Bartomeu²,Costa Antonio²,Segura Jaume¹

Affiliation:

1. Electronic Systems Group (GSE-UIB) at the University of the Balearic Islands,Spain

2. University of the Balearic Islands,Department of Chemistry,Spain

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10052111/10052113/10052527.pdf?arnumber=10052527

Reference23 articles.

1. Monolithic CMOS MEMS Oscillator Circuit for Sensing in the Attogram Range

2. CMOS–MEMS resonators: From devices to applications

3. Ultrasensitive Molecule Detection Based on Infrared Metamaterial Absorber with Vertical Nanogap

4. Gas chemical sensitivity of a CMOS MEMS cantilever functionalized via evaporation driven assembly

5. In-Plane Vibration of Hammerhead Resonators for Chemical Sensing Applications

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A 164-dBΩ Transimpedance Amplifier for Monolithic CMOS-MEMS Oscillators in Biosensing Applications;IEEE Access;2024

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