Suppression of Spurious Modes in Aluminum Nitride S<sub>1</sub> Lamb Wave Resonators Using A Mechanical Soft-Contact Scheme-Reference-Cited by-同舟云学术

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Suppression of Spurious Modes in Aluminum Nitride S₁ Lamb Wave Resonators Using A Mechanical Soft-Contact Scheme

Published:2023-01-15 Issue: Volume: Page:
ISSN:
Container-title:2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
language:
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Author:

Tung Shao-Siang¹,Hsu Tzu-Hsuan¹,Ho Yens²,Chen Yung-Hsiang²,Pradeep Yelehanka R.³,Chand Rakesh³,Li Ming-Huang¹

Affiliation:

1. National Tsing Hua University,Department of Power Mechanical Engineering,Hsinchu,Taiwan

2. Vanguard International Semiconductor Corporation,Hsinchu,Taiwan

3. Vanguard International Semiconductor Corporation Singapore PTE. Ltd,Singapore

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10052111/10052113/10052454.pdf?arnumber=10052454

Reference13 articles.

1. S-band High Passive Gain Resonant Transformers Based on Aluminum Nitride FBAR Resonators

2. Study on the Spurious Modes in FBAR Resonators with Quasi-Free Edges

3. On the geometry design of AlN Lamb wave resonators with predefined shallow release cavities;hsu;Proc 2022 Solid-State Sensor Actuator and Microsyst Workshop (Hilton Head),2022

4. Spectrum-clean S1 AlN Lamb wave resonator with damped edge reflectors

5. A 300-μm W 1.9-ghz cmos oscillator utilizing micromachined resonators

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Miniature LiNbO₃/SiO₂/Si SH-SAW Resonators With Near-Spurious-Free Response;IEEE Electron Device Letters;2023-07

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