Fabrication of High-Frequency 2D Flexible pMUT Array
Author:
Affiliation:
1. KU Leuven,Faculty of Electrical Engineering (ESAT-MNS),Belgium
Funder
KU Leuven
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10052111/10052113/10052246.pdf?arnumber=10052246
Reference21 articles.
1. Design and fabrication strategy for an efficient lead zirconate titanate based piezoelectric micromachined ultrasound transducer
2. Bendable Piezoelectric Micromachined Ultrasound Transducer (PMUT) Arrays Based on Silicon-On-Insulator (SOI) Technology
3. Curved micromachined ultrasonic transducers
4. Ferroelectric hysteresis and improved fatigue of PZT (53/47) films fabricated by a simplified sol–gel acetic-acid route
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1. A Curve-Structured Flexible Pmut with Enhanced Acoustic Sensitivity;2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS);2024-01-21
2. Ultrasound Imaging With a 128 Channels Piezoelectric Micromachined Ultrasound Transducer (pMUT): Single-Line-Transmission vs. Plane-Wave;2023 IEEE International Ultrasonics Symposium (IUS);2023-09-03
3. A 50x20 Row-Column Addressed PMUT Array on Silicon Substrate for Imaging;2023 IEEE International Ultrasonics Symposium (IUS);2023-09-03
4. Polyimide-On-Silicon 2D Piezoelectric Micromachined Ultrasound Transducer (PMUT) Array;Sensors;2023-05-17
5. Emerging Wearable Ultrasound Technology;IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control;2023
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