Periodic Cavities on the IR-Absorber for Responsivity Enhancement of CMOS-MEMS Thermoelectric IR Sensor-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Periodic Cavities on the IR-Absorber for Responsivity Enhancement of CMOS-MEMS Thermoelectric IR Sensor

Published:2023-01-15 Issue: Volume: Page:
ISSN:
Container-title:2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
language:
Short-container-title:

Author:

Li Yung-Chen¹,Chou Tien¹,Lin Pen-Sheng¹,Huang Yu -Cheng²,Shih Fuchi²,Lin You -An³,Yen Da-Jen³,Lai Mei-Feng¹,Fang Weileun¹

Affiliation:

1. National Tsing Hua University,Dept. of Power Mechanical Eng.,Hsinchu City,Taiwan

2. National Tsing Hua University,Inst. of NanoEngineering and MicroSyst.,Hsinchu City,Taiwan

3. National Tsing Hua University,Dept. of Materials Science and Eng.,Hsinchu City,Taiwan

Funder

National Science and Technology Council

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10052111/10052113/10052530.pdf?arnumber=10052530

Reference14 articles.

1. Fundamental limit of nanophotonic light trapping in solar cells;yu;Proceedings of the National Academy of Sciences,2010

2. Infrared thermopile sensors with high sensitivity and very low temperature coefficient

3. Novel High Thermal Resistance Structure Design for Responsivity and Detectivity Enhancements of Cmos Mems Thermoelectric Infrared Sensor

4. Mid-infrared optical properties of thin films of aluminum oxide, titanium dioxide, silicon dioxide, aluminum nitride, and silicon nitride

5. CMOS MEMS Thermoelectric Infrared Sensor With Plasmonic Metamaterial Absorber for Selective Wavelength Absorption and Responsivity Enhancement

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP