A Force-Balance Capacitive MEMS Gravimeter with Superior Response Time, Self-Noise and Drift-Reference-Cited by-同舟云学术

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A Force-Balance Capacitive MEMS Gravimeter with Superior Response Time, Self-Noise and Drift

Published:2023-01-15 Issue: Volume: Page:
ISSN:
Container-title:2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
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Author:

Gao Le¹,Li Fangzheng¹,Zhang Jian¹,Cai Bingyang¹,Wu Wenjie¹,Tu Liangcheng²

Affiliation:

1. Huazhong University of Science and Technology,The MOE Key Laboratory of Fundamental, Physical Quantities Measurement, Hubei Key Laboratory of Gravitation and Quantum Physics, PGMF and School of Physics,Wuhan,China,430074

2. Sun Yat-sen University,TianQin Research Center for Gravitational Physics and School of Physics and Astronomy,China

Funder

National Natural Science Foundation of China

National Key Research and Development Program of China

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10052111/10052113/10052380.pdf?arnumber=10052380

Reference16 articles.

1. Measurement of Tidal Tilt by a Micromechanical Inertial Sensor Employing Quasi-Zero- Stiffness Mechanism

2. Atmospheric pressure and gravity

3. Uncertainty of absolute gravity measurements;van camp;Journal of Geophysical Research Solid Earth,2005

4. Structure Design and Fabrication of an Area-changed Bulk Micromachined Capacitive Accelerometer

5. On the Air Buoyancy Effect in MEMS-Based Gravity Sensors for High Resolution Gravity Measurements

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