Towards a Better CMOS-MEMS Resoswitch Using Electroless Plating for Contact Engineering
Author:
Affiliation:
1. National Taiwan University,Institute of Applied Mechanics,Taipei,Taiwan
Funder
National Science and Technology Council
Taiwan Semiconductor Manufacturing Company
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10052111/10052113/10052575.pdf?arnumber=10052575
Reference18 articles.
1. Surface Condition Influence on the Nonlinear Response of MEMS CC-Beam Resoswitches
2. A 125-KHZ CMOS-MEMS Resoswitch Embedded Zero Quiescent Power OOK/FSK Receiver
3. A Micromechanical Frequency Controlled Pulse Density Modulator
4. CW-powered squegging micromechanical clock generator
5. Polycide Contact Interface to Suprress Squegging in Micromechanical Resowitches;lin;IEEE 27th International Conference,2014
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1. Toward High-Bit-Rate CMOS-MEMS Resoswitches;2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS);2024-01-21
2. Micromechanical vibro-impact systems: a review;Journal of Micromechanics and Microengineering;2023-08-08
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