Towards Ultra-High Spatial Resolution Sensing of GHz Ultrasound Using Strain Modulation of Field Effect Transistors-Reference-Cited by-同舟云学术

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Towards Ultra-High Spatial Resolution Sensing of GHz Ultrasound Using Strain Modulation of Field Effect Transistors

Published:2023-01-15 Issue: Volume: Page:
ISSN:
Container-title:2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
language:
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Author:

Sanghvi Rohan¹,Kuo Justin²,Ravi Adarsh¹,La Amit¹

Affiliation:

1. Cornell University,SonicMEMS Laboratory,USA

2. Geegah Inc.,USA

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10052111/10052113/10052433.pdf?arnumber=10052433

Reference14 articles.

1. Si-based unreleased hybrid MEMS-CMOS resonators in 32nm technology

2. Hybrid-level Fresnel zone plate for diffraction efficiency enhancement

3. Acoustic Radiation from Transducers

4. Phase sensitive imaging of 10 GHz vibrations in an AlN microdisk resonator

5. Broad-band Mach-Zehnder interferometers as high performance refractive index sensors: Theory and monolithic implementation

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