A 3D-Printed Functional MEMS Accelerometer-Reference-Cited by-同舟云学术

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A 3D-Printed Functional MEMS Accelerometer

Published:2023-01-15 Issue: Volume: Page:
ISSN:
Container-title:2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
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Author:

Pagliano Simone¹,Marschner David E.¹,Maillard Damien²,Ehrmann Nils³,Stemme Göran¹,Braun Stefan³,Villanueva Luis Guillermo²,Niklaus Frank¹

Affiliation:

1. KTH Royal Institute of Technology,Sweden

2. École Polytechnique Fédérale de Lausanne,Switzerland

3. Hochschule Kaiserslautern,Germany

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10052111/10052113/10052385.pdf?arnumber=10052385

Reference12 articles.

1. Micro 3D printing of a functional MEMS accelerometer

2. Two-step MEMS microfabrication via 3D direct laser lithography

3. Programmable Mechanical Properties of Two‐Photon Polymerized Materials: From Nanowires to Bulk

4. The First 3-D-Printed z-Axis Accelerometers With Differential Capacitive Sensing

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. High-G MEMS Accelerometer With Cross-Symmetric Structures;IEEE Sensors Journal;2024-01-15

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