Wafer-Level Patterning of Tin Oxide Nanosheets for MEMS Gas Sensors
Author:
Affiliation:
1. Southern University of Science and Technology,Shenzhen,China,518055
Funder
Shenzhen Research Foundation
Research and Development
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10052111/10052113/10052390.pdf?arnumber=10052390
Reference25 articles.
1. Inkjet printed chemical sensor array based on polythiophene conductive polymers
2. Sensitive NO 2 gas sensors employing spray-coated colloidal quantum dots
3. Co-sputtered Pd/SnO2:NiO heterostructured sensing films for MEMS-based ethanol sensors
4. A review of MEMS-based metal oxide semiconductors gas sensor in Mainland China
5. Sensitive and Low-Power Metal Oxide Gas Sensors with a Low-Cost Microelectromechanical Heater
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