A Compliant Self-Stabilization Nanopositioning Device With Modified Active–Passive Hybrid Vibration Isolation Strategy-Reference-Cited by-同舟云学术

A Compliant Self-Stabilization Nanopositioning Device With Modified Active–Passive Hybrid Vibration Isolation Strategy

Author:

Zhu Zhongyuan¹^ORCID,Tang Hui¹^ORCID,Huang Yunwei¹^ORCID,Lin Zhihang¹,Tian Yanling²,Yu Peng³^ORCID,Su Chanmin³^ORCID

Affiliation:

1. State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou, China

2. School of Engineering, University of Warwick, Coventry, U.K.

3. State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences (CAS), Shenyang, China

Funder

National Key R&D Project

National Natural Science Foundation of China

Guangdong International Cooperation Program of Science and Technology

European Union's Horizon 2020 research and innovation programme

Engineering Technology Center of Guangdong General University

Shenzhen Science and Technology R&D Funds

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Computer Science Applications,Control and Systems Engineering

Link

Reference34 articles.

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