In-house SiN process development for integrated photonic applications
Author:
Affiliation:
1. IIT Madras,Centre for Programmable Photonic Circuit and Systems (CPPICS),Department of Electrical Engineering,Chennai,India,600036
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10117590/10117577/10117733.pdf?arnumber=10117733
Reference9 articles.
1. Wavelength-Independent Directional Couplers for Integrated Silicon Photonics
2. Fitting refractive-index data with the Sellmeier dispersion formula
3. How does it scale? Comparing quantum and classical nonlinear optical processes in integrated devices
4. Ultra-smooth silicon nitride waveguides based on the Damascene reflow process: fabrication and loss origins
5. Low-Loss Si3N4 TriPleX Optical Waveguides: Technology and Applications Overview
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1. A Compact and High-Q value SiN Microring Resonator for Microwave Photonic Applications;2024 IEEE Silicon Photonics Conference (SiPhotonics);2024-04-15
2. SiN Photonic Integrated Circuit for Pump Laser Suppressed Nonlinear Signal Generations;2024 IEEE Silicon Photonics Conference (SiPhotonics);2024-04-15
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